Hello,

I have an electrode structure with 3 metals - gold, Ti and Pd. On top of
each metal I have a layer of SiN insulator. When I clean these structures
electrochemically using Sulfuric acid with maximum voltage around 1.5 mV,
some areas of SiN on gold metal seems to delaminate or cracks appear.

Does anyone know what might be happening during electro-chemical cleaning?

Thanks
Sheela
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