Dear MEMS community

Our lab has been thinking about acquiring a chemical mechanical polishing
tool. We are tight in budget so I'm wondering what would be an economical
solution. Would it be possible for us to build one ourselves? What caveats
do we need to look for if we are looking for a second-hand one? We are
interested in planarizing photoresist (with plated metal) and silicon
primarily. We typically process small pieces of samples (1in^2 or so) and
seldom do full wafers.

Many thanks.

Leo

--
Xiaoguang "Leo" Liu
Assistant Professor
Electrical and Computer Engineering, Davis MM-Wave Research Center
University of California, Davis
3169 Kemper Hall, One Shields Avenue, Davis, CA, 95616
[email protected]
http://ucdart.net
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