Hi, Leo.
I have some experience with Logitech PM5 polishing/lapping tool. I'm not
sure about the price. It is single-wafer system, more like laboratory/R&D
tool, not quite productive, so the price should not be so high. The choice
to build the CMP tool yourself depends on your finishing roughness and
sample thickness uniformity requirements. PM5 has very good control over the
lapping flatness, and you would spend years trying to repeat what is already
done by Logitech. If your samples are small and you don't need to remove
lots of the hard material (like silicon), and your finishing/uniformity
requirements are low, you can try to arrange the home-built system and then
use commercially available slurries for CMP. The cheapest version for the
first experiments would be the fixed glass plate constantly wetted by the
slurry and your sample temporary bonded to the larger carrier (like 10x10
cm) moved by the hand over the glass plate in random translation/rotation
manner. This method is slow and requires patience, however it would give you
some understanding what you realy need.
Cheers.
Darius
To: General MEMS discussion
Subject: [mems-talk] Chemical Mechanical Polishing
Dear MEMS community
Our lab has been thinking about acquiring a chemical mechanical polishing
tool. We are tight in budget so I'm wondering what would be an economical
solution. Would it be possible for us to build one ourselves? What caveats
do we need to look for if we are looking for a second-hand one? We are
interested in planarizing photoresist (with plated metal) and silicon
primarily. We typically process small pieces of samples (1in^2 or so) and
seldom do full wafers.
Many thanks.
Leo
--
Xiaoguang "Leo" Liu
Assistant Professor
Electrical and Computer Engineering, Davis MM-Wave Research Center
University of California, Davis
3169 Kemper Hall, One Shields Avenue, Davis, CA, 95616 [email protected]
http://ucdart.net _______________________________________________
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