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MEMSnet Home: MEMS-Talk: Multi layer su8 soft bake temperature
Multi layer su8 soft bake temperature
2013-03-13
Rajiv Panigrahi
2013-03-14
André Bödecker
Multi layer su8 soft bake temperature
Rajiv Panigrahi
2013-03-13
Dear folks,
                     I am doing multilayer coating using negative photo
resist(SU -8) May i know what will be soft baking temperature and its
duration for 2nd layer and other. In Microchem datasheet , information is
about mono layer soft baking and PEB. Will it be same for other layer too ?

Thanking you.

--
With Regards,

Rajiv Panigrahi
Research Scholar
CeNSE, IISc, Bangalore (India)
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