Yuan,
For ballpark estimating, you can assume $10k per mask level as a general rule of
thumb for Development. The true number varies depending on:
1. Depth of etch
2. Thickness and composition of evaporated material
3. Type of Polyimide
4. Time of release
5. Wafer type
6. Lot size
7. Feature size
8. Type and thickness of metal
9. Lot size
10. Individual fab capability and presence of standard processes for the steps
you need.
Hope this helps.
-------------------------------------
Buzz
Busbee Hardy
Business Development Manager
MEMSCAP Inc.
3021 E. Cornwallis Rd (PHYSICAL ADDRESS)
PO Box 14486 (MAIL)
Durham, NC 27709
T-919-248-1486
M-919-641-3084
F-919-248-4110
http://www.memscapinc.com
http://www.memscap.com
_______________________________________
From: [email protected] on behalf of Yuan
Jia
Sent: Wednesday, March 20, 2013 1:40 PM
To: [email protected]
Subject: [mems-talk] MEMS device foundry price estimate
Dear all,
Hi, I want to do a cost analysis of my MEMS device using a foundry service.
Since I fairly new to this field, I am not familiar with the how much it
would charge for some processes.
So I am wondering if anyone can give me a price estimate on the following
processes (per 4 inch wafer, or any other charging standard)?
1. Back side anisotropic etching
2. Thermal evaporation
3. Photolithography
4. Polyimide substrate deposition and pattern
5. XeF2 release
Thanks very much
Best Regards
Yuan Jia
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_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org
Want to advertise to this community? See http://www.memsnet.org
To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk
