Dear MEMS researchers:
I research detailed informations about the deposition of optical
polymers such as polyimides, siloxane, PMMA, and other (but having
optical properties). The application is the fabrication of low-loss
optical waveguides, combined with standard MEMS technology. Also, the
deposition process must to be compatible with MEMS micromachining (low
temperature processing). If the patterning of these waveguides is well
described in the literature (NTT, Du Pont), the deposition chemistry
process is not easily available. Usually, this process is closed to the
sol-gel but modified (reflow bellow 300°C).
If you have some information sources (publications, web, etc.) please
send me it.
Also, I am looking for mechanical parameters of polymers (Young,
Poisson, etc.)
Sincerely yours,
C. Gorecki

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Dr. Christophe Gorecki, Senior Researcher
Laboratoire d'Optique P.M. Duffieux,Université de Franche-Comté
16 Rte de Gray, 25030 Besançon Cedex, France
Tel: +33-3-81666594, fax: 33-3-81666423
e-mail: christophe.gorecki@univ-fcomte.fr