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MEMSnet Home: MEMS-Talk: SU8 for Au Plating
SU8 for Au Plating
2013-03-19
Jocelyn Ng
2013-04-04
Kevin Nichols
2013-04-04
Michael Martin
2013-04-03
André Bödecker
2013-04-03
Bill Moffat
2013-04-04
Jocelyn Ng
2013-04-04
André Bödecker
SU8 for Au Plating
Bill Moffat
2013-04-03
Joycelyn,
                  Missed your email.  Get in contact with me and I will send you
details of sub-micron metal pillars, 10 micron metal pillars and up to 30 micron
metal pillars using either standard positive resist or photosensitive polyimide.
Bill Moffat

-----Original Message-----
From: mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org [mailto:mems-
talk-bounces+bmoffat=yieldengineering.com@memsnet.org] On Behalf Of André
Bödecker
Sent: Wednesday, April 03, 2013 1:52 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] SU8 for Au Plating

Dear Jocelyn,



what is the reason for you to use SU-8? This resist is designated as a permanent
resist so it is quite unsuitable for plating processes in the case you want to
remove it afterwards. For such applications I would recommend a normal positive
resist.



Best regards,

André Bödecker



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