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MEMSnet Home: MEMS-Talk: Silicon Nitride shorting metal layers
Silicon Nitride shorting metal layers
2013-04-29
nahid vahabi
2013-04-30
Michael Martin
2013-04-30
basar bolukbas
2013-04-30
Ruiz, Dan (SGNCOE)
2013-04-30
nahid vahabi
2013-04-30
Me
2013-04-30
hamood@ceme.nust.edu.pk
Silicon Nitride shorting metal layers
nahid vahabi
2013-04-30
Hello all,

Thank you for all the amazing comments. More details about my process:

pressure set: 500 mTorr,
RF power=60 watt
temperature:300 C

Thank you,
Nahid
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