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MEMSnet Home: MEMS-Talk: UV 26-3.0
UV 26-3.0
2013-05-10
Jocelyn Ng
UV 26-3.0
Jocelyn Ng
2013-05-10
Dear all,

I'm currently using photoresists uv26. I need to reflow the resist. But I tried
several temperature still it couldn't hit the profile I want. At lower
temperature like 165C the reflow is not enough; when I try to go higher like
180C the resist burnt.
Any comments or advice about this photoresists is very much welcomed.

Thank you in advance.

Best Regards,
Jocelyn

Sent from my iPhone
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