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MEMSnet Home: MEMS-Talk: work with thin wafers
work with thin wafers
2013-05-23
Hong Wang
2013-05-23
Salem Saadon
2013-05-29
[email protected]
2013-05-23
Tang Tian
2013-05-28
AMAT Klaus Beschorner
work with thin wafers
[email protected]
2013-05-29
Dear Hong,

if you look for simple lab equipment you can get it from idonus in
Switzerland ( www.idonus.com ). Their specialties are custom made
solutions.

Best regards
Christian

On 22.05.2013 20:55, Hong Wang wrote:
> Dear All,
> We start working on lithography and bonding process using  170 um thin
> fused silica  for microfluidic devices. We always got broken wafers.
> We are looking for materials and techniques for supporting the thin wafer.
> The support wafer should be easily removed after the device is assembled.
> Any input will be appreciated.
> Hong
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