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MEMSnet Home: MEMS-Talk: micron size holes in SU8
micron size holes in SU8
2013-06-04
Antoine Blin
micron size holes in SU8
Antoine Blin
2013-06-04
Hi,

I am searching to make 2 - 5 microns diameter holes in SU8 within a 20 -
40 microns thickness range, of course with a chrome mask.
Anyone would have a good recipee (exposure seems very important,
cycles?, filters?..)?

Regards,

Antoine
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