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MEMSnet Home: MEMS-Talk: More exposure dose for Cu
More exposure dose for Cu
2013-09-20
Ricky Anthony
More exposure dose for Cu
Ricky Anthony
2013-09-20
Hi All,

I was wondering why does Copper susbtrates require higher exposure dose. I
understand that it has something to do with the reflection from the copper
substrate. Can anyone explain it.

Many Thanks,
Ricky Anthony
Tyndall National Institute
Cork, Ireland
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