Have you looked at KMPR?



Patrice Topart, PhD
Gestionnaire de groupe, Microfabrication
Group Manager Microfabrication
INO
2740 Einstein
Québec, Qc, Canada
G1P 4S4
G Tél/Phone: 418-657-7406, 2502
/  Fax: 418-657-7009
  Email: [email protected]
 WWW: www.ino.ca

-----Message d'origine-----
De : [email protected] [mailto:mems-talk-
[email protected]] De la part de Ricky Anthony
Envoyé : Monday, September 23, 2013 5:02 AM
À : [email protected]
Objet : [mems-talk] Thick Permanent Photoresist

Hi,

I was wondering if anyone can suggest me thick permanent photoresist (70-100um)
single spin. I know of SU-8 but I need resists which have lower CTE~ (as low as
20ppm/C) or close.

Many Thanks,

Ricky Anthony
Tyndall National Institute
Ireland
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Hosted by the MEMS and Nanotechnology Exchange, the country's leading
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Visit us at http://www.mems-exchange.org

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