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MEMSnet Home: MEMS-Talk: Thick Permanent Photoresist
Thick Permanent Photoresist
2013-09-23
Ricky Anthony
2013-09-23
TOPART Patrice
2013-09-24
Ricky Anthony
2013-09-27
Ricky Anthony
2013-09-24
DongJuan Xi
Thick Permanent Photoresist
DongJuan Xi
2013-09-24
KMPR is another option you can check into.

http://microchem.com/Prod-KMPR.htm


On Mon, Sep 23, 2013 at 2:02 AM, Ricky Anthony wrote:

> Hi,
>
> I was wondering if anyone can suggest me thick permanent photoresist
> (70-100um) single spin. I know of SU-8 but I need resists which have lower
> CTE~ (as low as 20ppm/C) or close.
>
> Many Thanks,
>
> Ricky Anthony
> Tyndall National Institute
> Ireland
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