Hi,
Thanks for your reply. I have looked into KMPR. But I am not sure of its CTE. I
asked the company, but was told that since it is developed for molding purposes,
CTE of KMPR was ignored.
So, I was wondering if there is thick resist, with low CTE. Or any Polyimides
which can give me a thickness of (70-100um, highly unlikely).
Many Thanks,
Ricky
-----Original Message-----
From: [email protected] [mailto:mems-talk-
[email protected]] On Behalf Of TOPART Patrice
Sent: 23 September 2013 18:42
To: 'General MEMS discussion'
Subject: Re: [mems-talk] Thick Permanent Photoresist
Have you looked at KMPR?
Patrice Topart, PhD
Gestionnaire de groupe, Microfabrication Group Manager Microfabrication INO
2740 Einstein
Québec, Qc, Canada
G1P 4S4
G Tél/Phone: 418-657-7406, 2502
/ Fax: 418-657-7009
Email: [email protected]
: WWW: www.ino.ca
-----Message d'origine-----
De : [email protected] [mailto:mems-talk-
[email protected]] De la part de Ricky Anthony Envoyé :
Monday, September 23, 2013 5:02 AM À : [email protected] Objet : [mems-talk]
Thick Permanent Photoresist
Hi,
I was wondering if anyone can suggest me thick permanent photoresist (70-100um)
single spin. I know of SU-8 but I need resists which have lower CTE~ (as low as
20ppm/C) or close.
Many Thanks,
Ricky Anthony
Tyndall National Institute
Ireland
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider
of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org
Want to advertise to this community? See http://www.memsnet.org
To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk
********************************************************************************
**
Ce courrier lectronique s'adresse uniquement la personne d sign e ci-dessus,
il est confidentiel et ne doit pas tre remis une autre personne, ni reproduit
et son contenu ne peut tre autrement divulgu .
Si ce courrier lectronique vous est transmis par erreur, veuillez nous en
avertir imm diatement l'adresse [email protected]. Nous vous remercions de votre
collaboration.
This email is directed in confidence solely to the person named above, and may
not otherwise be distributed, copied or disclosed. If you have received this
email by error, please notify us immediately by email to address
[email protected]. Thank you for your cooperation.
********************************************************************************
**
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org
Want to advertise to this community? See http://www.memsnet.org
To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk
