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MEMSnet Home: MEMS-Talk: solgel
solgel
1999-06-30
frank.meyer@daimlerchrysler.com
solgel
frank.meyer@daimlerchrysler.com
1999-06-30
Hej!

I am searching for solgel parameters or a special kind of solgel for a simple
SiO2-insulation layer on a aluminiumoxid substrate. It should be rather thick
to level the Pt conducting path on the substrate.

Thanks

Frank


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