hi,
Prof. Jeffrey P. Wolinski,
  I'm chayanika,working on mems design.I'm trying to model a cantilever
sensor through coventorware,but i don't found any process to deposit piezo
resistive materiel on cantilever.plea help.

thank you,
chayanika josh.
m.tech scholar,besu

thank u,i'll reply soon...........


On Thu, Oct 24, 2013 at 12:32 AM, Denis Petrov wrote:

> Hi Girija,
>
> in fact, there are numbers of ways of how to fabricate a microcantilever
> beam.
> A lot of them are described in books on MEMS technology (i.e. Menz, Mohr,
> Paul). But it is difficult to answer your question since you do not even
> describe, which procedure you are going to use (bulk or surface
> micromachining) and which material should the cantilever be fabricated
> from. For example, a cantilever can be metallic, bimetallic, or
> polysilicon.
>
> In either way you will most probably have to  fabricate a microstructure
> (cantilever geometry) using microlithography and then underetch the
> sacrificial matereal to make the beam moveable.
>
>
> Regards,
> Denis
>
>
>
> 2013/10/23 girija moona 
>
> > hello everyone,
> > it would be great if someone could help me microcantilever fabrication. i
> > need all the steps in detail... since in am very new to this field and
> want
> > to work in the area to microcantilever sensors. i will be very thankful
> if
> > i get some basic procedure for microcantilever fabrication.
> > thanks
> >
> > Regards
> > Girija Moona
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