Hi All,

I have been working with THB 151N for some time now. I found it impossible to
develop the 5 um resist widths which completely dissolves on developing. I have
been using TMA238 developer and the resist thickness is 38-40um.

I was wondering if changing the developer could help anyway. I need a very clean
development of the resist.

Many Thanks,

Ricky Anthony
Tyndall National Institute
Lee Malting, Dyke Parade
Cork, Ireland


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