Hello all!

I am using PDMS to protect one side of the wafer during 8 hour KOH etch at
85C. I am using Sylgard 170.

I am having problems having a clean surface after wet-etching of PDMS. I am
using Dynasolve 217, but its not dissolving it completely (even after hours
of dipping in solution). I am even using Q-tip sometimes to remove PDMS in
the Dynasolve solution. There is always this white residue/layer left.

1. Am I missing something? Is there a better way to wet etch PDMS? How
about TBAF and NMP mixture? Is this more efficient than Dynasolve to remove
the residual PDMS?

2. Is there an inexpensive and quick way to protect the other side of the
wafer? (Other than protek and parylene coating. I am looking for something
which is easy to coat and easy to remove). How about Apezion W wax? Is it
stable at 85C?  How do you apply solid wax to the whole wafer?

(There is LPCVD silicon nitride film on the other-side but there are always
some pinholes and defects and it cant stand 8 hour etch.)

I would really appreciate the inputs.

Thanks
Abhinav Jain
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