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MEMSnet Home: MEMS-Talk: SU8 adhesion problems
SU8 adhesion problems
2014-03-10
Janis Klavins
2014-03-11
Nadim Morhell
2014-03-11
王舒禹
2014-03-11
Sophie Roman
2014-03-11
Bill Moffat
2014-03-11
Janis Klavins
2014-03-12
Parrish Ralston
2014-03-11
João Tiago dos Santos Fernandes
SU8 adhesion problems
王舒禹
2014-03-11
I suggest the glass be better and thoroughly cleaned. Use ultrasonic bath
for longer time.

On Monday, March 10, 2014, Janis Klavins  wrote:

> Hello everybody,
>
> I am trying to coat an SU8 material on ITO etched glass. I have a problem
> that during development the SU8 lifts off the glass very easily. if the
> glass sheet is immersed in the developer the SU8 lifts off and floats away.
>
> I believe that this is a baking problem (too much or not enough) after
> coating the SU8. I am using a two step kiln 65 degrees ( 1 min)  and 95
> degrees (4 min). The same settings for post exposure bake.
>
> Has anyone seen a problem like this?
>
> --
> Best regards,
> Mr. Janis Klavins
> EuroLCDs
> Phone: +37163600300
> Mobile: +37126141049
>
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