We use TOK NMD-W developer. It can be used with i-line or DUV. It is .24N.

Robert

-----Original Message-----
From: [email protected] [mailto:mems-talk-
[email protected]] On Behalf Of Jocelyn Ng
Sent: Friday, June 06, 2014 11:40 PM
To: General MEMS discussion
Subject: [mems-talk] MF CD-26 Developer

Hello,

I'm looking for replacement to the CD-26 developer. It's a TMAH based developer.
Is there any suggestion out there for the replacement developer?

Any comments and suggestions is welcomed.

Thanks lot.

Best Regards,
Jocelyn

Sent from my iPhone
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