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MEMSnet Home: MEMS-Talk: Si-Nitride
Si-Nitride
1999-07-09
Marc Llaguno
Si-Nitride
Marc Llaguno
1999-07-09
hello everyone,

what happens to Si3N4 when it is exposed to KOH for long periods of time?
is there a specific procedure for cleaning the surface of the nitride?

thanks

Marky
UPenn


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