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MEMSnet Home: MEMS-Talk: Shrinkage problem on SU8 layer on Si Substrate
Shrinkage problem on SU8 layer on Si Substrate
2014-10-23
KarthiKeyan K
2014-10-23
Andrew Sarangan
2014-10-27
KarthiKeyan K
2014-10-27
Bill Moffat
2014-10-28
Sajeesh P
2014-10-29
Andrew Sarangan
2014-10-27
Sajeesh P
Shrinkage problem on SU8 layer on Si Substrate
Sajeesh P
2014-10-28
You can also bake on hotplate.Its mentined some where, during the soft
baking cover the sample with petridish so that solvent will vapourised
uniformly.Then the problem of uneven heating during softbaking can be
prevented.This will reduce the balling up of SU 8.

Regards
Sajeesh
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