Has anyone worked with the dry (or tape) photoresist sheets that acts as a mask
for DRIE etches ? If so, could you please recommend a specific type for our
backside through si etch ? We have fairly large features, 100umx100um windows
that we'd like to etch through the wafer.

Thanks,

        --Kris

K. Vossough, Ph.D.
Nano and Micro Technology Consultants
E-mail: [email protected]
Voice: (408)373-5413
Fax: (650)798-5001
MEMS and Nano Technology :: Nano and Micro Technology Consultants
View on www.memswork.net
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

Want to advertise to this community?  See http://www.memsnet.org

To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk