Hello,
You can use Kapton tape or AZ4562 resist.

On Wed, Feb 25, 2015 at 7:11 AM, K.Vossough  wrote:

> Has anyone worked with the dry (or tape) photoresist sheets that acts as a
> mask for DRIE etches ? If so, could you please recommend a specific type
> for our backside through si etch ? We have fairly large features,
> 100umx100um windows that we'd like to etch through the wafer.
>
> Thanks,
>
>         --Kris
>
> K. Vossough, Ph.D.
> Nano and Micro Technology Consultants
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