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MEMSnet Home: MEMS-Talk: Improving adhesion of sputtered metals on borofloat glass
Improving adhesion of sputtered metals on borofloat glass
2015-06-30
Gianmario Scotti
Improving adhesion of sputtered metals on borofloat glass
2015-06-30
[email protected]
2015-07-01
Ruiz, Dan (SGNCOE)
2015-07-01
André Bödecker
2015-07-01
Gianmario Scotti
Improving adhesion of sputtered metals on borofloat glass
2015-07-01
shay
Improving adhesion of sputtered metals on borofloat glass
[email protected]
2015-06-30
Hi Mario,
   Nickle is a great adhesion layer, though if you are doing electrochemistry I
would use tantalum.

Regards,
  Michael
________________________________________
From: [email protected] [mems-talk-
[email protected]] on behalf of Gianmario Scotti
[[email protected]]
Sent: Thursday, June 25, 2015 6:20 AM
To: General MEMS discussion
Subject: [mems-talk] Improving adhesion of sputtered metals on borofloat
glass

Hey all,


I am sputtering platinum on borofloat (i.e. "pyrex") glass using ~10 nm of
chromium as adhesion layer. Adhesion seems poor, and I am looking at
various ways to improve it. Could you suggest some?



mario






--
Gianmario Scotti

Post-doc researcher
Helsinki University
Division of Pharmaceutical Chemistry and Technology
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