Hello Mario,

a good cleaning step can improve the adhesion of sputtered layers,
especially on borofloat wafers.

Regards,
André Bödecker

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Auftrag von [email protected]
Gesendet: Dienstag, 30. Juni 2015 22:59
An: General MEMS discussion
Betreff: Re: [mems-talk] Improving adhesion of sputtered metals on borofloat
glass

Hi Mario,
   Nickle is a great adhesion layer, though if you are doing
electrochemistry I would use tantalum.

Regards,
  Michael
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From: [email protected]
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Gianmario Scotti [[email protected]]
Sent: Thursday, June 25, 2015 6:20 AM
To: General MEMS discussion
Subject: [mems-talk] Improving adhesion of sputtered metals on borofloat
glass

Hey all,


I am sputtering platinum on borofloat (i.e. "pyrex") glass using ~10 nm of
chromium as adhesion layer. Adhesion seems poor, and I am looking at various
ways to improve it. Could you suggest some?



mario






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