Mario,
It should be ok. Might be something in the surface preparation or base
pressure and atmosphere in the system.

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Gianmario
Scotti
Sent: Thursday, June 25, 2015 1:21 PM
To: General MEMS discussion
Subject: [mems-talk] Improving adhesion of sputtered metals on borofloat
glass

Hey all,


I am sputtering platinum on borofloat (i.e. "pyrex") glass using ~10 nm of
chromium as adhesion layer. Adhesion seems poor, and I am looking at various
ways to improve it. Could you suggest some?



mario






--
Gianmario Scotti

Post-doc researcher
Helsinki University
Division of Pharmaceutical Chemistry and Technology Viikinkaari 5E (PO Box
56) FI-00014 http://www.helsinki.fi/pharmacy/chemtech/en/index.html


Visiting researcher
Aalto University, School of Electrical Engineering http://elec.aalto.fi/en/


Micronova, Tietotie 3
02150 Espoo
Finland
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