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MEMSnet Home: MEMS-Talk: SiC molding
SiC molding
1999-07-12
Luke Currano
SiC molding
Luke Currano
1999-07-12
I am looking for companies that can deposit a 50-100 micron layer
of amorphous SiC on a 4" substrate that I supply.  There will be large
features on the substrate (100 micron), and the substrate will be
subsequently etched entirely to leave a free-standing SiC structure. I am
not interested in SiC wafers or epitaxial SiC.  Any information would be
appreciated.

Thank you,
    Luke Currano

*****************************************
*Luke Currano                           *
*BS/MS Research Assistant               *
*MicroElectroMechanical Systems Lab     *
*Department of Mechanical Engineering   *
*University of Maryland, College Park MD*
*Office: 2110 Engineering Bldg          *
*Phone: (301) 405-2981                  *
*Fax: (301) 405-3966                    *
*****************************************


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