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MEMSnet Home: MEMS-Talk: Re: Thick resist
Re: Thick resist
1999-07-15
lin wang
Re: Thick resist
lin wang
1999-07-15
AZ4620 can go pretty thick, but not sure up to 5-10 um. Polyimide can go
that thik using multiple layers. EPON su-8 can be thick up to a few
humdres um.

-Lin


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