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MEMSnet Home: MEMS-Talk: Re: Can you help me?
Re: Can you help me?
1999-07-16
nigel r. sharma
1999-07-16
Tseng-Yang Hsu
Re: Can you help me?
Tseng-Yang Hsu
1999-07-16
The Si wafer needs to be connected to the positive side of your power supply
even for the second glass-Si bond.
Good luck.

Tseng-Yang Hsu
Integrated Micromachines
626-396-0030
[email protected]

-----Original Message-----
From: Debjani Pal 
To: [email protected] 
Date: Thursday, July 15, 1999 2:05 PM
Subject: Can you help me?


>
>Hi,
>
>I am a graduate student, who has just started work on MEMS.
>My work needs bonding glass anodically to both sides of
>single-crystal silicon.We bonded glass to one side of the wafer and then
>tried bonding glass to the other side as well.
>But it does not work in spite of doubling the applied voltage.
>Any suggestions/references about this will be most welcome.
>
>Debjani
>
>Research Scholar (Semiconductor Group)
>Department of Physics                 Ph: (080)309-2316
>Indian Institute of Science           Fax:(080)334-1683
>Bangalore - 560012
>
>
>


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