Dear mems-talk community,

I am using SPTS(Orbotech) DRIE ICP etcher for etching TSV but using Bosch
process. since my device process' requirements are with scallops < 20nm,  I
am looking for a recipe (non-bosch) which uses both Etch and Depo steps
simultaneously.
Could you please guide me in this about the possibility of developing the
same?

Thanks in advance,
Regards,

Ashok Kumar D,
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