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MEMSnet Home: MEMS-Talk: Call for Papers
Call for Papers
1999-07-23
Christopher Muhlstein
Call for Papers
Christopher Muhlstein
1999-07-23
Those of you interested in mechanical properties of thin films may find the
following call for papers and symposium interesting.

Regards,
Chris Muhlstein

ASTM Symposium:
Mechanical Properties of Structural Films
November 15-16, 2000
Orlando, FL

Films or layers that are applied to substrates are frequently used for
electronic, decorative, barrier, and wear applications. Additionally,
photolithography used by the microelectronics industry has lead to
micron-scale
mechanical components made from thin films. The class of structural materials
that are manufactured as films are referred to as "structural films."  These
structural films are the basis of mechanical components that are often
integrated with electronic circuitry.  In the U.S. these integrated devices
are
referred to as microelectromechnical systems (MEMS).

Mechanical properties of thin films have been recognized as an important part
of material performance for over a century.  However, the advent of
microelectromechanical systems and other applications of structural films have
lead to a renewed interest in both the measurement and understanding of the
mechanical behavior of thin films.  This symposium will emphasize the
characterization of mechanical properties of structural films.  Submissions of
abstracts related to structural films are particularly encouraged.  Symposium
topics include:

     * Mechanical Property Characterization
            Tensile Properties
            Fracture
            Fatigue Crack Initiation and Growth
            Creep
     * Indentation Techniques for Thin Films*
     * Test Structures for Thin Film Characterization

Selected papers from the symposium will be published in an ASTM special
technical publication (STP) volume.  This symposium is sponsored by ASTM task
group E08.05.03 on Structural Films for MEMS and Electronic Applications and
E08.01 on Research and Education.

For more information and abstract submission please contact:

Chris Muhlstein
LBNL
1 Cyclotron Road
MS 62-203
Berkeley, CA  94720

email:  [email protected]



Christopher Muhlstein
U.C. Berkeley/LBNL
1 Cyclotron Road
MS 62-203
Berkeley, CA  94720

[email protected]
voice: 510-486-5656
fax: 510-486-4995
http://www.lbl.gov/Ritchie/Programs/FILM
Chair, ASTM E08.05.03 on Structural Films for
          MEMS and Electronic Applications


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