Chandra Kavita,

I have found that AZP4620 is a good choice in the 5 - 10 micron range.
Electronic Visions has been working with thick resists and has developed
excellent starting parameters for AZP4620.  If you would like a copy please
email [email protected]   or call (602)-437-9492
and I will send you a copy.
Loren St. Clair
Staff Engineer
Electronic Visions

Phone: (602)-437-9492 x 121
Fax: (602)-437-9435

Email: mailto:[email protected]