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MEMSnet Home: MEMS-Talk: Nitride Stiction, request for data
Nitride Stiction, request for data
1999-07-27
Ami Heines
Nitride Stiction, request for data
Ami Heines
1999-07-27
Hi all,

I've been looking for data and couldn't find any regarding stiction energy
of materials other than polysilicon, I was wondering if by using different
materials one can reduce the stiction problem.

Thanks,
Ami Heines.


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