Quality inspection after anodic bonding of aluminum and glass
markarian nikolai
1999-07-27
surfaces]
Hello All,
Does anybody know how to inspect the bonding quality after bonding thin glass
plate and 2 micron aluminum layer deposited on silicon wafer?
Will highly appreciate any kind of information.
Thanks,
Nikolai Markarian
Department of Mechanical Engineering
New Jersey Institute of Technology
University Heights
Newark, NJ 07102-1982
[email protected]
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