I have a box of 6" SOI wafers (epi 0.2 um, oxide 0.36 um) to make some
capacitive driven resonators with 1um mechanical features with no
electronics.  To get this done fast, should I get someone to implant it
for me or should I order some spin on glass and do the work myself? and
does anybody know a good ion implant service in Florida?  Any
relevant information regarding SOI doping would be appreciated.  Thanks!

Joe