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MEMSnet Home: MEMS-Talk: Better resolution for desktop publishing masks
Better resolution for desktop publishing masks
1999-02-04
John R Lodmell
Better resolution for desktop publishing masks
John R Lodmell
1999-02-04
        I have recently used a commercial printer to make a mask on printer's
film.  He used a Linotronic printer with 2540 dpi.  The mask gave us about 25
micron resolution, which I understand is pretty typical.
        I would really like about 10 micron resolution, but our
photolithography system does not have reduction capability (only 1:1).  Does
anyone know how to get closer to 10 microns?  Try to find higher dpi
capabilities?  Commercially available reduction to make a new mask from the
existing mask?
        Any suggestions would be appreciated.

John Lodmell
[email protected]


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