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MEMSnet Home: MEMS-Talk: Measuring resistivity of a thin Si layer.
Measuring resistivity of a thin Si layer.
1999-08-07
NILESH D MANKAME
Measuring resistivity of a thin Si layer.
NILESH D MANKAME
1999-08-07
hi,
We want to measure the resistivity of a thin Si device layer. We have
tried using 4 point probe measurements but haven't got satisfactory
results.
Can anybody advise?

- Nilesh


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