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MEMSnet Home: MEMS-Talk: SOG > 5 micron thick
SOG > 5 micron thick
1999-08-16
Xin Zhang
SOG > 5 micron thick
Xin Zhang
1999-08-16
Hi,

I was wondering if there is any spin-on-glass (SOG)
materials that could get spun upto 5 to 10 micron thick!?...
I will appreciate if you could give me any feedbacks.

Best regards,

Xin Zhang
=========================================================================
Xin Zhang

Massachusetts Institute of Technology          Phone:  (617) 253 8479
77 Massachusetts Avenue
Bld. 31, Rm. 261F                              Fax:    (617) 258 6093
Cambridge, MA 02139-4307                       Email:  xinz@mtl.mit.edu
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