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MEMSnet Home: MEMS-Talk: re:Thin film NiTi on Si
re:Thin film NiTi on Si
1999-08-24
Kiyotaka Mori
re:Thin film NiTi on Si
Kiyotaka Mori
1999-08-24
HI,



You had better to use SiO2 or Si3N4 instead of Si. Forming SiNi is your
problem since the silicide is brittle. The SiO2(i.e. Thermal) can protect
from forming silicide for crystalization of NiTi.

This is just one possibility.

Good luck.



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Kiyotaka Mori (Graduate Student)

Dept.of Materials and Nuclear Engineering,
BLDG.090,
University of Maryland at College Park,
College Park, MD 20742
Tel: 301-405-5229
Fax: 301-314-9467
E-mail: [email protected]
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