A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: SU-8 10 Protocol problems
SU-8 10 Protocol problems
1999-08-24
Kelvin Liu
SU-8 10 Protocol problems
Kelvin Liu
1999-08-24
Hi,
        I'm working with SU-8 10 and am having some adhesion and
developing problems. We are trying to obtain 30 micron deep features, but
when developing, the features either tend to all come off the slide or not
develop fully down to the glass. It seems like exposure time is not a
problem as adhesion of the SU-8 to the glass slide is. We are playing
around with baking methods and times. Does anyone have any advice about
baking such as hot plate vs. oven, temp and time, and prebaking the glass
slides to dehydrate them. Any help would be greatly appreciated. Thanks

Kelvin Liu


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
University Wafer
MEMStaff Inc.
Process Variations in Microsystems Manufacturing