Dear MEMS community,
  Does anyone know the stress of heavily Boron-doped singlecrystal silicon
lays and epitaxial singlecrystal silicon layer used for etch-stop. Is there
any method to reduce the stress?

Thanks very much.
Regards
Junhua Zhu
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Junhua Zhu
MEME Research Group
Department of Precision Instruments
Tsinghua Univ.
Beijing
P.R. China
100084