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MEMSnet Home: MEMS-Talk: Surface emmisivity measurement
Surface emmisivity measurement
1999-08-31
Nilesh D. Mankame
Surface emmisivity measurement
Nilesh D. Mankame
1999-08-31
hi,

I want to measure the emmissivity of a thin device Si layer.
If anyone has any experience with this , can I know of it?
Also does anyone know the emmissivity of a CMP <100> Si layer, in the
fresh-from-mfgr condition?
Thanks for your time.

- Nilesh


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