Dear Group,

I am working on a project that requires planarization of a CVD oxide layer on 4
inch substrates. I have spoken with Sandia about their CMP capabilities but
they are set up for 6 inch substrates. Does anyone know of a source for CMP on
4 inch wafers? Any suggestions would be appreciated.

Dave Koester
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MCNC Electronic Technologies Division           (919) 248-1493 (office)
MEMS Technology Applications Center             (919) 248-1455 (fax)
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