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MEMSnet Home: MEMS-Talk: Re: CO2 release system
Re: CO2 release system
1998-12-14
Gerhard Lammel
1998-12-14
Ezekiel Kruglick
Re: CO2 release system
Ezekiel Kruglick
1998-12-14
While I was at UCLA we bought one from "Polaris" (at least I think that
was the name). I think they were a French company and it was designed
for biological samples though, we used it for die and not wafers. Hope
that
helps, I don't have any contact information for them but recommend you
look through biolab equipment catalogs.

            -Zeke

William L Benard wrote:

> Hello,
>
> Does anyone know of commercial vendor for CO2 release/supercritical
> release systems?
>
> Thank-you,
>
> Regards
> William Benard
>
>


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