Dear Jan,
Karl Suss if quite familiar with BCB films.  The coating and exposure
applications for BCB films have been optimized on our tools.  There are
techniques for uniform coatings on odd shape substrates that will impress you.
These include: minimum dispensing of BCB material, edge bead control,  and
uniform coatings for rectangular substrates.  Contact us at 800-685-7877

Regards,
Joe Brown
>>> Jan Sundermeyer  08/02 6:17 AM >>>
Hello,

i intend to do contact lithography on a BCB-film (a polymer film) which is
spun on a rectangular glass sample. For the given application i need
resolution which is as high as possible. Unfortunately the resolution is
still unsatifactory. I believe that it is caused by the edge bead of the
BCB-film and the photoresist.
 I try to remove the photoresist edge bead by exposing and developing the
edge, using a simple shadow mask. That works fine when doing lithography on
glass only.
 I try to remove the bcb edge by etching it, using RIE. I can't measure any
remaining edge bead. Nevertheless the resolution on BCB films is much worse
than that on glass alone.

Thank you for any comments,

     Jan Sundermeyer
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