Hellow, for the etching quartz, you can do it by the solution of BHF.
the mask ; Cr 150 A and Au 2000 A layer and Cr/Gold can be patterned for mask.

Etching in BHF (80 C degree in temp.)  You can try it.
Good luck to you. May the grace of our Lord be with you.
Best regards.

Weijie Wang wrote:

> Hello,
>
> I am going to etch 10 micron depth grooves on quartz wafer. What's kind of
> etchant I have to use and what's kind of mask I have to use when etching
> is processing?
>
> Thank you in advance.
>
> Weijie Wang
> Simon Fraser University
> wwangc@sfu.ca

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