Summary of ultrasonic drilling responses.  Thanks to all that responed!

Dr. Kevin M. Walsh
Associate Professor of Electrical Engineering
Director of the Lutz Microtechnology Cleanroom
University of Louisville
Lutz Hall, Room 436
Brook St and Warnock Ave
Louisville, KY 40292
(502) 852-0826 office
(502) 852-1577 fax
email: [email protected] or [email protected]
WWW: http://mitghmr.spd.louisville.edu

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From: "Kevin M. Walsh" 
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Subject: question about ultrasonic drilling system
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Mike,

Could you please email me info about the UltraSonic Drilling system that =
you bought (Vendor, model, price, tel no)?

I would also like to see if our XYZ CE MEMS group (me, John Naber, Rick =
Baldwin and Rob Keynton) could visit you and your lab one more time?  If =
so, would a Tues or Thur be good.  We would drive up in the evening, spend =
the nite, and then visit you the next day.

Thanks!!
Kevin


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Date: Tue, 14 Sep 1999 08:51:43 -0400
From: "Lapp, Daniel S" 
Subject: RE: ultrasonic drilling
To: "'Kevin M. Walsh'" ,
        "'[email protected]'" 
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Dr. Walsh,

I don't know of any ultrasonic-drilling machines that are available for sale.
Most companies build them on their own.

Corning sells 7740 (PYREX) glass wafers that are ultrasonically drilled to your
specifications  (1mm diameter holes are no problem).  Contact me if you rather
purchase drilled glass wafers, than a drilling machine.

Regards,

Daniel S. Lapp
Product Manager
Corning Incorporated
HP CB 8-3
Corning, NY 14831

Tel:  607.974.4329
Fax: 607.974.7618
e-mail: [email protected]




> ----------
> From:         Kevin M. Walsh[SMTP:[email protected]]
> Reply To:     Kevin M. Walsh;[email protected]
> Sent:         Friday, September 10, 1999 12:18 AM
> To:   [email protected]
> Subject:      ultrasonic drilling
>
> Does anyone know of a vendor that manufactures an Ultrasonic Drilling
> Machine appropriate for drilling relatively-small holes (1 mm in
> diameter) into glass wafers.
>
> Thanks,
>
>
> Dr. Kevin M. Walsh
> Associate Professor of Electrical Engineering
> Director of the Lutz Microtechnology Cleanroom
> University of Louisville
> Lutz Hall, Room 436
> Brook St and Warnock Ave
> Louisville, KY 40292
> (502) 852-0826 office
> (502) 852-1577 fax
> email: [email protected] or [email protected]
> WWW: http://mitghmr.spd.louisville.edu
>
>

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Reply-To: "Bill Stockdale/John Baker" 
From: "Bill Stockdale/John Baker" 
To: "Kevin M. Walsh" , 
References: <[email protected]>
Subject: Re: ultrasonic drilling
Date: Tue, 14 Sep 1999 08:43:17 -0500
Organization: Sensor Prep Services
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Kevin -

I believe that our firm can help you.  Can you please call Sensor Prep
Services at 630-365-9645 phone or fax us a print at 630-365-9643.  We can go
over your design and see what we can do for you.

Thank you,

Kris Burgeson
Sensor Prep Services
----- Original Message -----
From: Kevin M. Walsh 
To: 
Sent: Thursday, September 09, 1999 11:18 PM
Subject: ultrasonic drilling


> Does anyone know of a vendor that manufactures an Ultrasonic Drilling
> Machine appropriate for drilling relatively-small holes (1 mm in
> diameter) into glass wafers.
>
> Thanks,
>
>
> Dr. Kevin M. Walsh
> Associate Professor of Electrical Engineering
> Director of the Lutz Microtechnology Cleanroom
> University of Louisville
> Lutz Hall, Room 436
> Brook St and Warnock Ave
> Louisville, KY 40292
> (502) 852-0826 office
> (502) 852-1577 fax
> email: [email protected] or [email protected]
> WWW: http://mitghmr.spd.louisville.edu
>
>


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Reply-To: "Mary Moreland" 
From: "Mary Moreland" 
To: "Kevin M. Walsh" , 
Subject: Re: ultrasonic drilling
Date: Tue, 14 Sep 1999 10:22:40 -0400
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Dear Sir,

We no longer manufacture machines for sale but we do provide ultrasonic
machining services.  We can provide polished borosilicate glass wafers to
your specifications.  Please feel free to contact Melinda Ooten at
(937)456-7537 with your requirements.

Regards,
Mary Moreland
Bullen Ultrasonics, Inc.


-----Original Message-----
From: Kevin M. Walsh 
To: [email protected] 
Date: Tuesday, September 14, 1999 1:15 AM
Subject: ultrasonic drilling


Does anyone know of a vendor that manufactures an Ultrasonic Drilling
Machine appropriate for drilling relatively-small holes (1 mm in
diameter) into glass wafers.

Thanks,


Dr. Kevin M. Walsh
Associate Professor of Electrical Engineering
Director of the Lutz Microtechnology Cleanroom
University of Louisville
Lutz Hall, Room 436
Brook St and Warnock Ave
Louisville, KY 40292
(502) 852-0826 office
(502) 852-1577 fax
email: [email protected] or [email protected]
WWW: http://mitghmr.spd.louisville.edu




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Message-ID: 
From: "Hadimioglu, Babur " 
To: "'Kevin M. Walsh'" 
Subject: RE: ultrasonic drilling
Date: Tue, 14 Sep 1999 09:12:34 PDT
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Kevin,

Try:

Bullen Ultrsonics, Inc.
4613 Camden Rd.
Eaton, OH 45320
(513) 456-7133
Fax: (513) 456-2779

Good luck,

Babur

----------------------------------------------


Dr. Babur Hadimioglu
Pricinal Scientist
Xerox Palo Alto Research Center
3333 Coyote Hill Road
Palo Alto, CA 94304
(650) 812-4257
Fax: (650) 812-4133
[email protected]



-----Original Message-----
From: Kevin M. Walsh [mailto:[email protected]]
Sent: Thursday, September 09, 1999 9:18 PM
To: [email protected]
Subject: ultrasonic drilling


Does anyone know of a vendor that manufactures an Ultrasonic Drilling
Machine appropriate for drilling relatively-small holes (1 mm in
diameter) into glass wafers.

Thanks,


Dr. Kevin M. Walsh
Associate Professor of Electrical Engineering
Director of the Lutz Microtechnology Cleanroom
University of Louisville
Lutz Hall, Room 436
Brook St and Warnock Ave
Louisville, KY 40292
(502) 852-0826 office
(502) 852-1577 fax
email: [email protected] or [email protected]
WWW: http://mitghmr.spd.louisville.edu


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Date: Tue, 14 Sep 1999 09:25:31 -0500
To: "Kevin M. Walsh" , [email protected]
From: John Klemic 
Subject: Re: ultrasonic drilling

--============_-1274803358==_============
Content-Type: text/plain; charset="us-ascii"

Kevin,

For holes that large why not use a regular drill?

I have drilled holes for prototype devices in silicon, glass, quartz, etc.
by mechanical means, i.e., with tiny drills. It has the advantage of being
relatively simple, cheap and quick. It has the disadvantage of not being
suitable for large quantity production, at least not at this time.

I've made holes ranging from 1.0 mm diameter in regular thickness wafers to
as small as 50 um in thinner substrates. Attatvched is a picture of some
750 um (0.75 mm) holes in a silicon wafer.

John Klemic

>Does anyone know of a vendor that manufactures an Ultrasonic Drilling
>Machine appropriate for drilling relatively-small holes (1 mm in
>diameter) into glass wafers.
>
>Thanks,
>
>
>Dr. Kevin M. Walsh
>Associate Professor of Electrical Engineering
>Director of the Lutz Microtechnology Cleanroom
>University of Louisville
>Lutz Hall, Room 436
>Brook St and Warnock Ave
>Louisville, KY 40292
>(502) 852-0826 office
>(502) 852-1577 fax
>email: [email protected] or [email protected]
>WWW: http://mitghmr.spd.louisville.edu
>


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--============_-1274803358==_============--


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Date: Tue, 14 Sep 1999 11:20:42 -0700
To: "Kevin M. Walsh" 
From: Gisela Lin 
Subject: Re: ultrasonic drilling
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>Does anyone know of a vendor that manufactures an Ultrasonic Drilling
>Machine appropriate for drilling relatively-small holes (1 mm in
>diameter) into glass wafers.


Try Gatan Corporation:

http://www.gatan.com/prep/601.html

Gisela



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Contact Norsam Technologies.  [email protected].  Phone #503-640-0586.

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Message-ID: <[email protected]>
From: "Arbuckle, Brian" 
To: "'Kevin M. Walsh'" ,
        "'[email protected]'"
         
Subject: RE: ultrasonic drilling
Date: Tue, 14 Sep 1999 11:52:37 -0700
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Dr Walsh,

I am also interested in finding a vendor that can use ultrasonic drilling to
drill into glass.  I would very interested in sharing any information you
should find on ultrasonic drilling vendors.

Brian W. Arbuckle
Technology Development Manager
Intarsia Corp
48611 Warm Springs Blvd.
Fremont, CA 94539
Phone: (510)403-6002
Fax:    (510)403-6180
e-mail: [email protected]
www.intarsiacorp.com




-----Original Message-----
From: Kevin M. Walsh [mailto:[email protected]]
Sent: Thursday, September 09, 1999 9:18 PM
To: [email protected]
Subject: ultrasonic drilling


Does anyone know of a vendor that manufactures an Ultrasonic Drilling
Machine appropriate for drilling relatively-small holes (1 mm in
diameter) into glass wafers.

Thanks,


Dr. Kevin M. Walsh
Associate Professor of Electrical Engineering
Director of the Lutz Microtechnology Cleanroom
University of Louisville
Lutz Hall, Room 436
Brook St and Warnock Ave
Louisville, KY 40292
(502) 852-0826 office
(502) 852-1577 fax
email: [email protected] or [email protected]
WWW: http://mitghmr.spd.louisville.edu


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Date: Tue, 14 Sep 1999 21:36:10 -0400
From: Alex Shenderov 
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You may want to get in touch with SonicMill (www.ceramics.com/sonic).
They make various models priced between $20,000 and $85,000.

Good luck.

A. Shenderov, President
Nanolytics Co.

Kevin M. Walsh wrote:

> Does anyone know of a vendor that manufactures an Ultrasonic Drilling
> Machine appropriate for drilling relatively-small holes (1 mm in
> diameter) into glass wafers.
>
> Thanks,
>
> Dr. Kevin M. Walsh
> Associate Professor of Electrical Engineering
> Director of the Lutz Microtechnology Cleanroom
> University of Louisville
> Lutz Hall, Room 436
> Brook St and Warnock Ave
> Louisville, KY 40292
> (502) 852-0826 office
> (502) 852-1577 fax
> email: [email protected] or [email protected]
> WWW: http://mitghmr.spd.louisville.edu




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Date: Wed, 15 Sep 1999 09:50:19 -0400
From: SONIC <[email protected]>
Subject: pricing
Sender: SONIC <[email protected]>
To: "Kevin M. Walsh" 
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Message text written by "Kevin B. Walsh"

Dear Dr. Kevin M. Walsh
Associate Professor of Electrical Engineering

        To help Universities we offer a university package to help cost. =
I
will send you the details.

                                                Linda Butler


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Date:   Wed, 15 Sep 1999 10:36:58 -0600
From: Graham McKinnon 
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Kevin,

Sonic Mill in Albuquerque makes units suitable for R&D and small volume
prototyping.  We have one of their systems and use it regularly.  We
have milled holes as small as 300 microns in diameter in glass with
their system.  Contact Wayne Meagher at  (505) 345-8376.

Buellen Ultrasonics makes bigger systems but they are intended for
manufacturing applications.


Graham McKinnon


-------- Original Message --------
Subject: ultrasonic drilling
Date: Fri, 10 Sep 1999 00:18:03 -0400
From: "Kevin M. Walsh" 
Reply-To: "Kevin M. Walsh" , [email protected]
To: [email protected]

Does anyone know of a vendor that manufactures an Ultrasonic Drilling
Machine appropriate for drilling relatively-small holes (1 mm in
diameter) into glass wafers.

Thanks,


Dr. Kevin M. Walsh
Associate Professor of Electrical Engineering
Director of the Lutz Microtechnology Cleanroom
University of Louisville
Lutz Hall, Room 436
Brook St and Warnock Ave
Louisville, KY 40292
(502) 852-0826 office
(502) 852-1577 fax
email: [email protected] or [email protected]
WWW: http://mitghmr.spd.louisville.edu

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Because Sonic-Mill is a small company, we cannot donate an entire machine.
However, we have put together a University Package that includes set-up,
training and all the materials required for start up.  This package has a
value of $3,040 but is offered free to any University with the purchase of a
machine.

Without knowing your exact applications, we cannot recommend a specific
machine.  The machines most often ordered by other Universities have run in
the neighborhood of $26,000.

We will send you via mail our complete literature package so that you can
see the entire machine line and also see some of the applications we have
run.

Please feel free to contact us with any questions.

The details of the University Package follow:

 <>


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------_=_NextPart_000_01BEFFAA.38CB2274--

Received: from unix2.it-datacntr.louisville.edu
        by gwise.louisville.edu; Wed, 15 Sep 1999 15:06:48 -0400
Received: from pegasus.lnls.br ([200.18.249.72])
        by unix2.it-datacntr.louisville.edu (8.8.8/8.8.8) with ESMTP id OAA12558
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        id S9N49WNK; Wed, 15 Sep 1999 15:30:02 -0300
Message-ID: <[email protected]>
Date: Wed, 15 Sep 1999 15:34:12 -0300
From: Izaque Alves Maia 
Reply-To: [email protected]
X-Mailer: Mozilla 4.6 [en] (Win95; I)
X-Accept-Language: en
MIME-Version: 1.0
To: [email protected]
Subject: ultrasonic drilling
Content-Type: text/plain; charset=us-ascii
Content-Transfer-Encoding: 7bit

Dear Dr. Walsh,
Please try
Gatan Inc.
6678 Owens Drive, Pleasanton, CA 94588-3334, USA
Tel 510 463 0200
Fax 510 463 0204

Gatan sells circular cutting tools from 0.25mm to 8.0 mm. Its ultrasonic
machine
drills also rectangular and square shapes. I have used this machine for
drilling
rectangular 3X4 mm. Its performance is impressive

Yours sincerely

Dr. Izaque A. Maia


>Does anyone know of a vendor that manufactures an Ultrasonic
>Drilling
>Machine appropriate for drilling relatively-small holes (1 mm in
>diameter) into glass wafers.

>Thanks,


>Dr. Kevin M. Walsh


Received: from unix2.it-datacntr.louisville.edu
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From: "bob lyness" 
To: "Kevin M. Walsh" , 
Subject: Re: ultrasonic drilling
Date: Wed, 15 Sep 1999 23:47:45 -0400
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Suggest you contact www.bullen-ultrasonics.com for leads.


-----Original Message-----
From: Kevin M. Walsh 
To: [email protected] 
Date: Tuesday, September 14, 1999 12:05 AM
Subject: ultrasonic drilling


>Does anyone know of a vendor that manufactures an Ultrasonic Drilling
>Machine appropriate for drilling relatively-small holes (1 mm in
>diameter) into glass wafers.
>
>Thanks,
>
>
>Dr. Kevin M. Walsh
>Associate Professor of Electrical Engineering
>Director of the Lutz Microtechnology Cleanroom
>University of Louisville
>Lutz Hall, Room 436
>Brook St and Warnock Ave
>Louisville, KY 40292
>(502) 852-0826 office
>(502) 852-1577 fax
>email: [email protected] or [email protected]
>WWW: http://mitghmr.spd.louisville.edu
>




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Date: Fri, 17 Sep 1999 09:21:56 -0400
From: "Constant Reyerse" 
To: [email protected], [email protected]
Subject: Re: ultrasonic drilling
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Hello Kevin,

I am not certain as to how this vendor achieves the holes in their =
materials, but they are a well established vendor for drilled sapphire, =
they may be able to help.

Insaco Inc.
1365 Canary Road
PO Box 9006
Quakertown, PA 18951-9006
Contact: Scott D. Mittle
215-536-3500 phone
215-536-7750 fax
[email protected]  =3D e-mail

Best regards,





Constant Reyerse
Sales Engineer, Midwest
Karl Suss America, Inc.=20
228 Suss Drive
Waterbury Center, VT 05677
Phone: 802-244-5181 ext. 403=20
Phone: 317-246-7741 Indianapolis Office
Fax: 802-244-5103


>>> "Kevin M. Walsh"  09/09/99 11:18PM >>>
Does anyone know of a vendor that manufactures an Ultrasonic Drilling
Machine appropriate for drilling relatively-small holes (1 mm in
diameter) into glass wafers.

Thanks,


Dr. Kevin M. Walsh
Associate Professor of Electrical Engineering
Director of the Lutz Microtechnology Cleanroom
University of Louisville
Lutz Hall, Room 436
Brook St and Warnock Ave
Louisville, KY 40292
(502) 852-0826 office
(502) 852-1577 fax
email: [email protected] or [email protected]=20
WWW: http://mitghmr.spd.louisville.edu=20
=20


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Date: Tue, 21 Sep 1999 14:35:20 +0200
From: Yaacov Bernstein 
Subject: RE: ultrasonic drilling
To: "'Kevin M. Walsh'" ,
        "'[email protected]'" 
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Kevin,
Try to check with
Bullen Ultrasonics Eaton, OH 45320
937-456-7133
www.bullen-ultrasonics.com
Regards,

Dr.Yaacov Bernstein            tel:   972-3-634-4488
Phone-Or Ltd.                      fax:  972-3-634-9292
P.O.B. 323                           e-mail [email protected]
Or-Yehuda 60252
Israel
www.phone-or.com


-----Original Message-----
From:   Kevin M. Walsh [SMTP:[email protected]]
Sent:   Fri, September 10, 1999 6:18 AM
To:     [email protected]
Subject:        ultrasonic drilling

Does anyone know of a vendor that manufactures an Ultrasonic Drilling
Machine appropriate for drilling relatively-small holes (1 mm in
diameter) into glass wafers.

Thanks,


Dr. Kevin M. Walsh
Associate Professor of Electrical Engineering
Director of the Lutz Microtechnology Cleanroom
University of Louisville
Lutz Hall, Room 436
Brook St and Warnock Ave
Louisville, KY 40292
(502) 852-0826 office
(502) 852-1577 fax
email: [email protected] or [email protected]
WWW: http://mitghmr.spd.louisville.edu