Hello everybody:
  Now I am bothered by the question of etching ZnO on SiO2 film.
We have tried some solution such as H3PO4 or HF and so on, but we cannot
get good effect. You are expected to give me some advice. Remember, the
solution must not attack SiO2 film when we etch ZnO. I will indebted to
your help. Thank you in advance.

Sincerely,
Li Gang
My E-mail: ligang@ime.pku.edu.cn
           mems@263.net


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